Energetic distribution and nature of traps in SiCN amorphous films

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Tkachuk A. I. Energetic distribution and nature of traps in SiCN amorphous films / Andrij Ivanovych Tkachuk, Volodymyr VolodymyrovychTetyorkin // XVIIІ International Freik Conference Physics and Technology of Thin Films and Nanosystems. Materials. / Ed. by Prof. V.V. Prokopiv. Ivano-Frankivsk: Publisher Vasyl Stefanyk Precarpathian National University, 2021. P. 75.