Tkachuk, Andrij IvanovychTetyorkin, Volodymyr VolodymyrovychТкачук, Андрій ІвановичТетьоркін, Володимир Володимирович2022-06-202022-06-202021Tkachuk A. I. Energetic distribution and nature of traps in SiCN amorphous films / Andrij Ivanovych Tkachuk, Volodymyr VolodymyrovychTetyorkin // XVIIІ International Freik Conference Physics and Technology of Thin Films and Nanosystems. Materials. / Ed. by Prof. V.V. Prokopiv. Ivano-Frankivsk: Publisher Vasyl Stefanyk Precarpathian National University, 2021. P. 75.https://dspace.cusu.edu.ua/handle/123456789/4165enArticle